TBW Industries Inc.
Patent Owner
Stats
- 11 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Sep 27, 2011 most recent publication
Details
- 11 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 147 Total Citation Count
- May 29, 2003 Earliest Filing
- 2 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
8025555 System for measuring and controlling the level of vacuum applied to a conditioning holder within a CMP systemJan 31, 11Sep 27, 11[B24B]
7913705 Cleaning cup system for chemical mechanical planarization apparatusFeb 07, 08Mar 29, 11[B08B]
7901267 Method for controlling the forces applied to a vacuum-assisted pad conditioning systemMay 07, 09Mar 08, 11[B24B]
7544113 Apparatus for controlling the forces applied to a vacuum-assisted pad conditioning systemNov 18, 05Jun 09, 09[B24B]
7166014 Chemical mechanical planarization process control utilizing in-situ conditioning processJan 25, 05Jan 23, 07[B24B]
7052371 Vacuum-assisted pad conditioning system and method utilizing an apertured conditioning diskMay 29, 03May 30, 06[B24B]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2008/0160,883 Abrasive configuration for fluid dynamic removal of abraded material and the likeAbandonedDec 14, 07Jul 03, 08[B24B]
2007/0087,672 Apertured conditioning brush for chemical mechanical planarization systemsAbandonedOct 18, 06Apr 19, 07[B24B]
Top Inventors for This Owner
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